For R&D and failure evaluation in nanofabrication.
Picture Credit score:Quantum Design
The Vista 300 from Molecular Vista is a nano IR instrument focused for superior semiconductor course of monitoring and defect evaluation.
Vista 300 combines an atomic pressure microscope with infrared spectroscopy to supply Photograph-induced Drive Microscopy (PiFM), a method that performs chemical mapping with a spatial decision of <5 nm, which is way superior to competing analytical strategies like TOF-SIMS or XPS. PiFM gives chemical maps of compounds and molecular supplies just like how EDX performs elemental mapping on the nanoscale. Whereas STEM-EDX has decision just like PiFM, it might solely see atomic species. PiFM, nonetheless, maps and identifies molecules, be they natural or polymeric contaminants, inorganic particles or nanostructures, or EUV resist movies and residues. PiFM is a noncontact method, so samples stay clear, making PiFM ideally suited for analysing floor functionalisation (even all the way down to monolayers) or figuring out nanoscale defects and particles.
A outstanding demonstration of PiFM is proven within the accompanying photos – PiFM is ready to map the chemical variations between uncovered and unexposed 16 nm half-pitch patterns in EUV resist earlier than the resist is developed. AFM topography reveals no trace of the uncovered sample, however PiFM detects the chemical modifications attributable to EUV publicity.
Vista 300 is designed to deal with full 300 mm wafers however does so in a minimal footprint of only one.1 x 1.1 m2. The device is totally developed and prepared for speedy orders. Demonstrations of Vista 300 on buyer wafers or different pattern can be found by contacting Dr. Shayz Ikram under.
In 2015, MVI was the primary firm to show <10nm decision with nano IR (beating the competitors by 10X on the time) and continues to steer the trade immediately with the introduction of recent automation options that make PiFM simpler than ever. MVI’s new AutoPiFM functionality identifies supplies and generates chemical maps and chemical fingerprint spectra with minimal person enter required. Sit again and let AutoPiFM do the work! Likewise, MVI’s new AutoAlign system robotically and optimally focuses the IR optical beam on the AFM tip, eliminating the necessity for the person to be taught the main points of optical alignment. These options make PiFM totally accessible to laboratory or manufacturing technicians.
With extra superior semiconductor processes depending on atomically skinny natural and dielectric layers with more and more smaller characteristic sizes, Vista 300 is an ideal hybrid topography and chemical metrology device for characterising Excessive NA EUV lithography, selective atomic layer deposition, Cu-Cu hybrid bonding processes, and sub-100 nm defects.
Dr. Sung Park, CEO of Molecular Vista